Abstract: Pattern-dependent random deviations in measurement of optimal focus distances can be minimized by separating scan paths into multiple types of scan paths that scan only a respective predetermined image region in semiconductor dies. A substrate including in-process semiconductor dies is coated with a photoresist layer, and is located onto a stage in a lithographic exposure tool. Maps of optimal focus distances are generated by performing optimal focus distance scans that cover a respective subset of image regions having distinct image patterns. The substrate can be leveled with respect to an optics system of the lithographic exposure tool employing a weighted average of multiple maps of optimal focus distances. Once the substrate is leveled on the stage, a lithographic exposure process can be performed with enhanced uniformity in the focus distances across the in-process semiconductor dies.
Inventor(s): Andrew P. Hull (McKinney, TX), John L. Rhoads (The Colony, TX), William T. Bigbee, Jr. (Melissa, TX) Assignee(s): Encore Wire Corporation (McKinney, TX) Law Firm: Warren Rhoades LLP (1 non-local offices) Application No., Date, Speed: 15394443 on 12/29/2016 (782 days app to issue)
Inventor(s): Fei Tong (Plano, TX), Sunil Vasisht (Plano, TX), Yuanyuan Yin (Plano, TX) Assignee(s): CAPITAL ONE SERVICES, LLC (McLean, VA) Law Firm: Finnegan, Henderson, Farabow, Garrett Dunner, LLP (9 non-local offices) Application No., Date, Speed: 15694128 on 09/01/2017 (536 days app to issue)
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